Product Description
ISBN: 9780982299104
TITLE: Practical MEMS : Analysis and Design of Microsystems, MEMS Sensors (accelerometers, Pressure Sensors, Gyroscopes), Sensor Electronics, Actuators, RF MEMS, Optical MEMS, and Microfluidic Systems
AUTHOR: Ville Kaajakari
PUBLISHER: Small Gear Publishing
PUBLISHER DATE: 17 Mar 2009